Microsystem Technology. Wolfgang Menz
Техническая литература.
- Название
- Microsystem Technology
- Автор:
- Wolfgang Menz
- Серия:
- Жанр:
- Техническая литература
- Год выпуска:
- 0
- isbn:
- 9783527613014
- Аннотация:
- This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.