Silicon Technologies. Ion Implantation and Thermal Treatment. Annie Baudrant
Техническая литература.
- Название
- Silicon Technologies. Ion Implantation and Thermal Treatment
- Автор:
- Annie Baudrant
- Серия:
- Жанр:
- Техническая литература
- Год выпуска:
- 0
- isbn:
- 9781118601112
- Аннотация:
- The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.